Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby

ABSTRACT

A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support configured to support a patterning device, the patterning device being configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table configured to hold a substrate; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the radiation beam is reflected from at least one grazing incidence mirror that enhances the spectral purity of the radiation beam.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a lithographic apparatus and a methodof using the apparatus in the manufacture of a device such as anintegrated circuit (IC). In particular, the present invention relates toa lithographic apparatus designed to be used with radiation having awavelength in the Extreme Ultra-Violet (EUV) range and wherein thelithographic apparatus is designed to provide a radiation beam withenhanced spectral purity.

2. Description of the Related Art

A lithographic apparatus is a machine that applies a desired patternonto a substrate, usually onto a target portion of the substrate. Alithographic apparatus can be used, for example, in the manufacture ofintegrated circuits (ICs). In that use, a patterning device, which mayalternatively be referred to as a mask or a reticle, may be used togenerate a circuit pattern to be formed on an individual layer of theIC. This pattern can be transferred onto a target portion (e.g.including part of one, or several, dies) on a substrate (e.g. a siliconwafer). Transfer of the pattern is typically via imaging onto a layer ofradiation-sensitive material (resist) provided on the substrate. Ingeneral, a single substrate will contain a network of adjacent targetportions that are successively patterned. Known lithographic apparatusinclude steppers, in which each target portion is irradiated by exposingan entire pattern onto the target portion at one time, and scanners, inwhich each target portion is irradiated by scanning the pattern througha radiation beam in a given direction, the “scanning” direction, whilesynchronously scanning the substrate parallel or anti-parallel to thisdirection. It is also possible to transfer the pattern from thepatterning device to the substrate by imprinting the pattern onto thesubstrate.

Between the reticle and the substrate is disposed a projection systemfor imaging the irradiated portion of the reticle onto the targetportion of the substrate. The projection system includes components fordirecting, shaping or controlling the projection beam of irradiation,and these components typically include refractive optics, reflectiveoptics, and/or catadioptric systems, for example.

An important feature in lithography is the size of features of thepattern applied to the substrate. It is desirable to produce apparatuscapable of resolving features as small and close together as possible. Anumber of parameters affect the available resolution of features, andone of these features is the wavelength of the radiation used to exposethe pattern.

It is anticipated that the use of EUV lithography will enable themanufacture of feature sizes down to 32 mm using radiation with an EUVwavelength between 5 and 20 nm, and typically 13.5 nm. Radiation at thiswavelength is absorbed in all materials and is therefore not suitablefor use with refractive optics. The optics in a projection system foruse with EUV lithography must therefore be based on reflective elements,for example mirrors, which can only operate in an Ultra-High-Vacuum(UHV) environment. The projection system is therefore enclosed in aProjection Optics Box (POB) which is kept under a vacuum.

However, a significant difficulty in EUV lithography is designing asystem which has a projection beam with high spectral purity.

For example, some EUV sources, especially plasma sources, emit radiationover a wide range of frequencies, even including infra red (IR) visible(VIS), ultra-violet (UV) and deep ultra-violet (DUV). These undesiredfrequencies will propagate and cause heating problems in theillumination and projection systems and cause undesired exposure of theresist if not blocked. In addition, although the multi-layered mirrorsof illumination and projection systems are optimized for reflection ofthe desired wavelength, e.g. 13.5 nm, they are optically flat and havequite high reflectivities at IR, VIS and UV wavelengths. It is thereforenecessary to select from the source a relatively narrow band offrequencies for the beam of radiation. Even where the source has arelatively narrow emission line which contains a large part of theenergy, it is necessary to reject radiation out of that line, especiallyat longer wavelengths. Previously, it has been proposed to use a thinmembrane as a filter to perform this function. However, such a film isvery delicate and becomes very hot, 200 - 300oC or more, leading to highthermal stresses and cracking, sublimation and oxidation in the highpower levels necessary in a lithographic projection apparatus. Amembrane filter also generally absorbs at least 50% of the desiredradiation.

Furthermore, U.S. Pat. No. 6,678,037, incorporated herein by reference,describes a lithographic projection apparatus wherein a grating spectralfilter is used in the radiation system of the lithographic projectionapparatus. The grating spectral filter in U.S. Pat. No. 6,678,037 isdesigned for allowing radiation of desired wavelengths to form a beam ofradiation and for deflecting radiation of undesired wavelengths. Thegrating spectral filter is substantially formed of a material having acomplex refractive index close to unity at the desired wavelengths andincludes silicon protrusions. The protrusions have a laminar sawtoothprofile or a laminar square wave profile and are present on a mirror,having a mirroring surface. Additionally, the filter in U.S. Pat. No.6,678,037 is silicon and does not block IR radiation very well.

SUMMARY OF THE INVENTION

It is an aspect of the present invention to provide a lithographicapparatus which increases the proportion of EUV radiation in aconditioned beam thereby providing enhanced spectral purity.

According to an embodiment of the present invention, a lithographicapparatus includes an illumination system configured to condition aradiation beam; a support configured to support a patterning device, thepatterning device being configured to impart the radiation beam with apattern in its cross-section to form a patterned radiation beam; asubstrate table configured to hold a substrate; and a projection systemconfigured to project the patterned radiation beam onto a target portionof the substrate, wherein the radiation beam is reflected from at leastone grazing incidence mirror that enhances the spectral purity of theradiation beam

By enhancing the spectral purity, the proportion of EUV radiation in theradiation beam is increased. The proportion of EUV radiation to, forexample, IR radiation is therefore increased by reflecting the radiationbeam from a grazing incidence mirror.

Grazing incidence mirrors may show significant polarization dependencein their reflection coefficients. In particular, the reflectance ofgrazing incidence mirrors may be polarization dependent for non-EUVradiation. For non-EUV radiation, the reflectance of p-polarized lightmay be less than s-polarized light. This effect may be used forincreasing the spectral purity of a radiation beam. By selecting theproper orientation of the grazing incidence mirrors, the spectral puritymay be enhanced. Grazing, typically means an angle of incidence measuredwith respect to the surface of a mirror of about 0-30°.

Typically, the lithographic apparatus includes an optical train and thespectral purity of the radiation beam may be enhanced or improved byhaving a three-dimensional optical train. Configuring the optical trainfrom two-dimensional to three-dimensional enhances the spectral purityof the radiation beam as the reflection coefficient, althoughsubstantially unchanged in the EUV region, is reduced in other regionsof the electromagnetic spectrum. For example, in about the 1000 nmregion, the reflection coefficient for a three-dimensional optical trainis significantly less than that of a two-dimensional optical train. Theproportion of EUV radiation in a reflected beam may therefore increasein a three-dimensional optical train. A substantial proportion of EUVradiation may be reflected at a certain angle whereas undesiredradiation such as IR radiation may be absorbed, substantially absorbed,deflected or refracted in other directions.

The lithographic apparatus may include two grazing incidence mirrors.The first grazing incidence mirror may be in a source-collector moduleof the lithographic apparatus and may be referred to as a gratingspectral purity filter. The second grazing incidence mirror may be inthe illumination system of the lithographic apparatus and may be thefinal mirror in the illumination system.

The optical train may be configured to be three-dimensional by, forexample, rotating a combination of a collector, a source and a firstgrazing incidence mirror. The collector or source may be rotated aroundan optical axis that rotates an intermediate focus of the radiation beamby, for example, +90 or −90°.

Alternatively, in a further embodiment the spectral purity of theradiation beam may be enhanced by introducing a further grazingincidence mirror in the intermediate focus of the lithographicapparatus. The optical axis may be substantially in the reflectingsurface of the further grazing incidence mirror at the position of theintermediate focus. This further grazing incidence mirror may act as afirst and second mirror, depending on the other grazing incidencemirrors in the lithographic apparatus. The further grazing incidencemirror in the intermediate focus may be used in combination with agrazing incidence mirror in the source-collector module, theillumination system or the projection system. The further grazingincidence mirror in the intermediate focus in combination with a grazingincidence mirror in the source-collector module of the lithographicapparatus or, alternatively, a grazing incidence mirror in theillumination system forms a three-dimensional optical train. Thethree-dimensional optical train enhances the spectral purity of thebeam. The grazing incidence mirror in the intermediate focus may imagethe intermediate focus onto itself, resulting in the radiation beambeing unchanged.

The further grazing mirror in the intermediate focus may be two-sided.When the grazing incidence mirror is in the focus of the collector, thegrazing incidence mirror may be two-sided. The grazing incidence mirrormay be as thin as possible in order to have both reflecting layers asclose to the optical axis as possible. The grazing incidence mirror mayhave a thickness less than about 1,000 μm, less than about 500 μm, orless than about 100 μm.

In a yet further embodiment, an additional mirror may be added in thesource-collector module which in combination with a further grazingincidence mirror in the illumination system enhances the spectralpurity.

The grazing incidence mirrors may have reflective surfaces including anyof the following: Ru, Rh, Pd, Mo, Nb, Au, Zr and Tc, or any combinationthereof. The reflective surface may have a thickness of about 1-1,000nm, or about 10-100 nm. The grazing incidence mirror may be a rutheniumgrazing incidence mirror. For 13.5 nm radiation, the reflection of thegrazing incidence mirror with a ruthenium surface may be higher thanabout 91% i.e. only 9% of the light may be lost.

The radiation used in the lithographic apparatus may have a wavelengthcorresponding to that of Extreme Ultra-Violet radiation (EUV). Theradiation used may have a wavelength of between about 5 nm and 20 nm,and about 13.5 nm.

According to a further embodiment, the lithographic apparatus mayinclude two grazing incidence mirrors. The spectral purity may beenhanced by configuring the optical train of the lithographic apparatusto be three-dimensional. The optical train may be configured to bethree-dimensional by, for example, rotating a combination of acollector, a source and a first grazing incidence mirror. A secondarygrazing incidence mirror may be in the illumination system of thelithographic apparatus.

Alternatively, the spectral purity may be enhanced by having a grazingincidence mirror in the intermediate focus of the lithographicapparatus. Preferably, the spectral purity may be further enhanced byhaving the grazing incidence mirror in the intermediate focus being partof a three-dimensional optical train. Typically, the further grazingincidence mirror in the intermediate focus in combination with a grazingincidence mirror in the source-collector-module of the lithographicapparatus or alternatively a grazing incidence mirror in theillumination system forms a three-dimensional optical train. Thethree-dimensional optical train enhances the spectral purity of thebeam.

In a yet further embodiment, an additional mirror may be added in thesource-collector module which in combination with a further grazingincidence mirror in the illumination system may be used to enhance thespectral purity.

According to another aspect of the present invention a devicemanufacturing method includes providing a conditioned radiation beamusing an illumination system; imparting a pattern to the radiation beam;and projecting the patterned beam or radiation onto a target portion ofthe substrate, wherein the radiation beam is reflected from at least onegrazing incidence mirror which has the effect of enhancing the spectralpurity of the radiation beam.

The spectral purity may be enhanced by configuring an optical train tobe three-dimensional. The optical train may be configured to bethree-dimensional by, for example, rotating a combination of acollector, a source and a first grazing incidence mirror. A secondgrazing incidence mirror may be in the illumination system.

Alternatively, the spectral purity may be enhanced by having a grazingincidence mirror in an intermediate focus. The spectral purity may befurther enhanced by having the grazing incidence mirror in theintermediate focus being part of a three-dimensional optical train. Thefurther grazing incidence mirror in the intermediate focus incombination with a grazing incidence mirror in thesource-collector-module of the lithographic apparatus or alternatively agrazing incidence mirror in the illumination system forms athree-dimensional optical train. The three-dimensional optical trainenhances the spectral purity of the beam.

In a yet further embodiment, an additional mirror may be added in thesource-collector module which in combination with a further grazingincidence mirror in the illumination system may be used to enhance thespectral purity.

The radiation may be EUV radiation.

The manufactured device may, for example, be an integrated circuits(IC), integrated optical system, guidance and detection pattern formagnetic domain memories, a liquid crystal display (LCDs) or a thin-filmmagnetic head.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention will now be described, by way ofexample only, with reference to the accompanying schematic drawings inwhich corresponding reference symbols indicate corresponding parts, andin which:

FIG. 1 depicts a lithographic apparatus according to an embodiment ofthe present invention;

FIG. 2 depicts a lithographic apparatus for use with ExtremeUltra-Violet (EUV) radiation according to an embodiment of the presentinvention;

FIG. 3 depicts a graph of reflection coefficient versus wavelength fors- and p-polarized light reflected from a ruthenium coated grazingincidence mirror;

FIGS. 4 a and 4 b depict a two- and three-dimensional optical train fors- and p-polarized light;

FIG. 5 depicts a lithographic apparatus for use with ExtremeUltra-Violet (EUV) radiation according to an embodiment of the presentinvention wherein the location of grazing incidence mirrors isidentified;

FIG. 6 depicts a graph of transmission versus wavelength for a two- andthree-dimensional optical train; and

FIG. 7 depicts a graph of transmission versus wavelength for a two- andthree-dimensional optical system along with a comparison to a systemwithout a grazing mirror in the intermediate focus.

DETAILED DESCRIPTION

FIG. 1 schematically depicts a lithographic apparatus according to anembodiment of the present invention. The apparatus includes anillumination system (illuminator) IL configured to condition a radiationbeam PB (e.g. UV radiation or EUV radiation). A support (e.g. a masktable) MT is consfigured to support a patterning device (e.g. a mask) MAand is connected to a first positioning device PM configured toaccurately position the patterning device in accordance with certainparameters A substrate table (e.g. a wafer table) WT is configured tohold a substrate (e.g. a resist-coated wafer) W and is connected to asecond positioning device PW configured to accurately position thesubstrate in accordance with certain parameters. A projection system(e.g. a refractive projection lens system) PL is configured to project apattern imparted to the radiation beam B by patterning device MA onto atarget portion C (e.g. including one or more dies) of the substrate W.

The illumination system may include various types of optical components,such as refractive, reflective, magnetic, electromagnetic, electrostaticor other types of optical components, or any combination thereof, fordirecting, shaping, or controlling radiation.

The support supports, e.g. bears the weight of, the patterning device.It holds the patterning device in a manner that depends on theorientation of the patterning device, the design of the lithographicapparatus, and other conditions, such as for example whether or not thepatterning device is held in a vacuum environment. The support structurecan use mechanical, vacuum, electrostatic or other clamping techniquesto hold the patterning device. The support structure may be a frame or atable, for example, which may be fixed or movable as required. Thesupport structure may ensure that the patterning device is at a desiredposition, for example with respect to the projection system. Any use ofthe terms “reticle” or “mask” herein may be considered synonymous withthe more general term “patterning device.”

The term “patterning device” used herein should be broadly interpretedas referring to any device that can be used to impart a radiation beamwith a pattern in its cross-section such as to create a pattern in atarget portion of the substrate. It should be noted that the patternimparted to the radiation beam may not exactly correspond to the desiredpattern in the target portion of the substrate, for example if thepattern includes phase-shifting features or so called assist features.Generally, the pattern imparted to the radiation beam will correspond toa particular functional layer in a device being created in the targetportion, such as an integrated circuit.

The patterning device may be transmissive or reflective. Examples ofpatterning devices include masks, programmable mirror arrays, andprogrammable LCD panels. Masks are well known in lithography, andinclude mask types such as binary, alternating phase-shift, andattenuated phase-shift, as well as various hybrid mask types. An exampleof a programmable mirror array employs a matrix arrangement of smallmirrors, each of which can be individually tilted so as to reflect anincoming radiation beam in different directions. The tilted mirrorsimpart a pattern in a radiation beam which is reflected by the mirrormatrix.

The term “projection system” used herein should be broadly interpretedas encompassing any type of projection system, including refractive,reflective, catadioptric, magnetic, electromagnetic and electrostaticoptical systems, or any combination thereof, as appropriate for theexposure radiation being used, or for other factors such as the use ofan immersion liquid or the use of a vacuum. Any use of the term“projection lens” herein may be considered as synonymous with the moregeneral term “projection system”.

As here depicted, the apparatus is of a reflective type (e.g. employinga reflective mask). Alternatively, the apparatus may be of atransmissive type (e.g. employing a transmissive mask).

The lithographic apparatus may be of a type having two (dual stage) ormore substrate tables (and/or two or more mask tables). In such“multiple stage” machines the additional tables may be used in parallel,or preparatory steps may be carried out on one or more tables while oneor more other tables are being used for exposure.

The lithographic apparatus may also be of a type wherein at least aportion of the substrate may be covered by a liquid having a relativelyhigh refractive index, e.g. water, so as to fill a space between theprojection system and the substrate. An immersion liquid may also beapplied to other spaces in the lithographic apparatus, for example,between the mask and the projection system. Immersion techniques arewell known in the art for increasing the numerical aperture ofprojection systems. The term “immersion” as used herein does not meanthat a structure, such as a substrate, must be submerged in liquid, butrather only means that liquid is located between, for example, theprojection system and the substrate during exposure.

Referring to FIG. 1, the illuminator IL receives a radiation from aradiation source SO. The source and the lithographic apparatus may beseparate entities, for example when the source is an excimer laser. Insuch cases, the source is not considered to form part of thelithographic apparatus and the radiation is passed from the source SO tothe illuminator IL with the aid of a beam delivery system including, forexample, suitable directing mirrors and/or a beam expander. In othercases the source may be an integral part of the lithographic apparatus,for example when the source is a mercury lamp. The source SO and theilluminator IL, together with the beam delivery system, if required, maybe referred to as a radiation system.

The illuminator IL may include an adjusting device for adjusting theangular intensity distribution of the radiation beam. Generally, atleast the outer and/or inner radial extent (commonly referred to asσ-outer and σ-inner, respectively) of the intensity distribution in apupil plane of the illuminator can be adjusted. In addition, theilluminator IL may include various other components, such as anintegrator and a condenser. The illuminator may be used to condition theradiation beam, to have a desired uniformity and intensity distributionin its cross-section.

The radiation beam PB is incident on the patterning device (e.g., maskMA), which is held on the support (e.g., mask table MT), and ispatterned by the patterning device. Having traversed the mask MA, theradiation beam PB passes through the projection system PL, which focusesthe beam onto a target portion C of the substrate W. With the aid of thesecond positioning device PW and a position sensor IF2 (e.g. aninterferometric device, linear encoder or capacitive sensor), thesubstrate table WT can be moved accurately, e.g. so as to positiondifferent target portions C in the path of the radiation beam PB.Similarly, the first positioning device PM and another position sensorIF1 (e.g. an interferometrice device, linear encoder or capacitivesensor) can be used to accurately position the mask MA with respect tothe path of the radiation beam B, e.g. after mechanical retrieval from amask library, or during a scan. In general, movement of the mask tableMT may be realized with the aid of a long-stroke module (coarsepositioning) and a short-stroke module (fine positioning), which formpart of the first positioning device PM. Similarly, movement of thesubstrate table WT may be realized using a long-stroke module and ashort-stroke module, which form part of the second positioning devicePW. In the case of a stepper, as opposed to a scanner, the mask table MTmay be connected to a short-stroke actuator only, or may be fixed. MaskMA and substrate W may be aligned using mask alignment marks M1, M2 andsubstrate alignment marks P1, P2. Although the substrate alignment marksas illustrated occupy dedicated target portions, they may be located inspaces between target portions. Such marks are known as scribe-lanealignment marks. Similarly, in situations in which more than one die isprovided on the mask MA, the mask alignment marks may be located betweenthe dies.

The depicted apparatus could be used in at least one of the followingmodes:

1. In step mode, the mask table MT and the substrate table WT are keptessentially stationary, while an entire pattern imparted to theradiation beam is projected onto a target portion C at one time (i.e. asingle static exposure). The substrate table WT is then shifted in the Xand/or Y direction so that a different target portion C can be exposed.In step mode, the maximum size of the exposure field limits the size ofthe target portion C imaged in a single static exposure.

2. In scan mode, the mask table MT and the substrate table WT arescanned synchronously while a pattern imparted to the radiation beam isprojected onto a target portion C (i.e. a single dynamic exposure). Thevelocity and direction of the substrate table WT relative to the masktable MT may be determined by the (de)magnification and image reversalcharacteristics of the projection system PS. In scan mode, the maximumsize of the exposure field limits the width (in the non-scanningdirection) of the target portion in a single dynamic exposure, whereasthe length of the scanning motion determines the height (in the scanningdirection) of the target portion.

3. In another mode, the mask table MT is kept essentially stationaryholding a programmable patterning device, and the substrate table WT ismoved or scanned while a pattern imparted to the radiation beam isprojected onto a target portion C. In this mode, generally a pulsedradiation source is employed and the programmable patterning device isupdated as required after each movement of the substrate table WT or inbetween successive radiation pulses during a scan. This mode ofoperation can be readily applied to maskless lithography that utilizesprogrammable patterning device, such as a programmable mirror array of atype as referred to above.

Combinations and/or variations on the above described modes of use orentirely different modes of use may also be employed.

FIG. 2 shows a side view of an EUV lithographic apparatus in accordancewith an embodiment of the invention. It will be noted that, although thearrangement is different to that of the apparatus shown in FIG. 1, theprinciple of operation is similar. The apparatus includes asource-collector-module or radiation unit 3, an illumination system ILand a projection system PL. Radiation unit 3 is provided with aradiation source LA which may employ a gas or vapor, such as for exampleXe gas or Li vapor in which a very hot discharge plasma is created so asto emit radiation in the EUV range of the electromagnetic radiationspectrum. The discharge plasma is created by causing a partially ionizedplasma of an electrical discharge to collapse onto the optical axis O.Partial pressures of 0.1 m bar of Xe, Li vapor or any other suitable gasor vapor may be required for efficient generation of the radiation. Theradiation emitted by radiation source LA is passed from the sourcechamber 7 into collector chamber 8 via a gas barrier structure or “foiltrap” 9. The gas barrier structure includes a channel structure such as,for instance, described in detail in U.S. Pat. Nos. 6,614505 and6,359,969, which are incorporated herein by reference. The collectorchamber 8 includes a radiation collector 10 which is formed, forexample, by a grazing incidence collector. Radiation passed by collector10 is reflected from a grating spectral purity filter 11 to be focusedin a virtual source point 12 (i.e. an intermediate focus) and anaperture in the collection chamber 8. From chamber 8, the radiation beam16 is reflected in illumination system IL via normal incidencereflectors 13,14 onto a reticle or mask positioned on reticle or maskedtable MT. A patterned beam 17 is formed which is imaged by projectionsystem PL via reflective elements 18,19 onto wafer stage or substratetable WT. More elements than shown may generally be present in theillumination system IL and projection system PL.

One of the reflective elements 19 has in front of it an NA disc 20having an aperture 21 therethrough. The size of the aperture 21determines the angle αi subtended by the radiation beam 17 as it strikesthe substrate table WT.

FIG. 3 is a graph of reflection coefficient versus wavelength for aruthenium grazing incidence mirror. The grazing incidence mirror isirradiated at an angle of incidence of 15o with respect to the surface.FIG. 3 shows two separate plots for s- and p- polarized light as afunction of the wavelength.

As grazing incidence mirrors show significant polarization dependence intheir reflection coefficient, this effect can be used for increasing thespectral purity of a radiation beam for EUV lithography. Therefore, bychoosing the proper orientation of grazing incidence mirrors, thespectral purity can be enhanced.

It is clear from FIG. 3 that the difference for s- and p-polarized lightis large, except for the EUV region such as between about 5 and 20 nm.Since EUV sources in general produce unpolarized light, half of thelight is reflected as p- and half as s-polarized light.

FIGS. 4a and 4 b show a two-dimensional and a three-dimensional opticaltrain, respectively. In the two-dimensional optical train shown in FIG.4 a, a second grazing incidence reflection reflects the part which waspreviously reflected as p- again as p-polarized light. The same holdsfor s-polarized light. The result is that the transmission t of the twomirror reflections in a two-dimensional optical train is:$t_{2d} = {{\frac{1}{2}r_{p}^{2}} + {\frac{1}{2}r_{s}^{2}}}$

For the three-dimensional optical train, as shown in FIG. 4 b, theresulting transmission t is:$t_{3d} = {{{\frac{1}{2}{r_{p} \cdot r_{s}}} + {\frac{1}{2}{r_{s} \cdot r_{p}}}} = {r_{s} \cdot r_{p}}}$

The transmissions for two-dimensional and three-dimensional opticaltrains are shown in FIG. 6. FIG. 6 clearly shows that for theEUV-region, there is no significant difference between the two- andthree-dimensional transmission values. However, there are regions wheredifferences occur such as around 1000 nm where the transmission curvesdeviate significantly. This feature can be used to increase spectralpurity.

FIG. 5 represents different positions for grazing incidence mirrors in anumber of different potential embodiments. The different positions forthe grazing incidence mirrors are identified as a1-a4. The differentembodiments are discussed below.

The optical train of the EUV apparatus according to a first embodimentof the present invention has two grazing incidence mirrors includingruthenium reflecting layers. The first grazing incidence mirror ispresent in the source-collector-module/radiation unit 3 and isrepresented by reference numeral 11 in FIG. 5 and is known as a gratingspectral purity filter. The second grazing incidence mirror is in theilluminator (IL) and may be either a grazing incidence mirror atposition a3 or a4.

The design of the EUV apparatus shown in FIG. 5 is two-dimensional,except for the radiation collector 10. By configuring the optical trainof the EUV lithographic apparatus into a three-dimensional arrangement,by for example rotating the source-collector-module 8 around a line fromthe middle of mirror 13 to through the intermediate focus 12 over 90°,the mirror 11 and either a mirror at position a3 or a4 are in athree-dimensional arrangement. This enhances spectral purity.

FIG. 6 shows that for a three-dimensional arrangement, although thetransmission is unchanged in the EUV region, the transmission issignificantly reduced in other regions of the spectrum. This means thatthe proportion of the EUV transmission in the radiation beam isincreased, therefore leading to enhanced spectral purity. In effect,this may be seen as providing a projection beam with less noise and agreater ratio of EUV radiation.

FIG. 7 relates to a second embodiment of the present invention wherein afurther grazing incidence mirror is added to the system shown in FIG. 5.The further grazing incidence is introduced in the intermediate focus 12of the lithographic apparatus shown in FIG. 5. The mirror positioned atthe intermediate focus 12 is a double sided mirror which is in the planeof the drawing shown in FIG. 5. The combination of mirror 11 and themirror at the intermediate focus 12 has a three-dimensional orientation.When a mirror at position a3 and a4 has the same orientation mirror 11(i.e. substantially perpendicular to plane of the drawing) then acombination of a mirror at either a3 or a4 with the additional mirror atthe intermediate focus 12 has a three-dimensional orientation.

FIG. 7 shows the transmission of systems consisting of a first rutheniumgrazing incidence mirror at 15o (maximum angle at the spectral purityreplacement mirror), and a second ruthenium grazing incidence mirror at6o (half the top-angle of the cone) at the intermediate focus.Transmissions are measured with the orientation of the grazing incidencemirrors in both two-dimensional and three-dimensional configurations.There is also a comparison to a system without a grazing incidencemirror in the intermediate focus.

The orientation of the second grazing incidence mirror is such that theoptical axis is in the mirror surface. This means that the secondgrazing incidence mirror images the intermediate focus onto itself,resulting in no changes in the radiation beam outline. By usingruthenium, the reflection of the mirror for 13.5 nm radiation will behigher than 91% i.e. only 9% of the light is lost.

The second grazing incidence mirror is also two-sided. This means thatthe mirror has a thickness such as about 10-100 nm in order to have bothreflecting layers as close to the optical axis as possible. Thethickness of the substrate of the mirror is very thin, with the opticalcoating being even thinner i.e. the substrate mainly determines thetotal thickness.

FIG. 7 shows that for three-dimensional optical systems the transmissionof radiation outwith that of EUV radiation is less than that oftwo-dimensional optical systems. For example, there is a significantreduction in infrared radiation for a three-dimensional optical train incomparison with that of a two-dimensional optical train. FIG. 7 alsoshows that improved results are obtained when there is a mirror in theintermediate focus.

The spectral purity of a beam will therefore be enhanced by using anoptical system which has a grazing incidence mirror in the intermediatefocus which is part of a three-dimensional optical train.

In a further embodiment, rather than rotating thesource-collector-module/radiation unit 3, a further mirror at positiona1 or a2 is added which in combination with either mirror 11, a3 or a4at the correct orientation enhances spectral purity.

Although specific reference may be made in this text to the use oflithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications, such as the manufacture of integrated opticalsystems, guidance and detection patterns for magnetic domain memories,flat-panel displays, liquid-crystal displays (LCDs), thin-film magneticheads, etc. It should be appreciatee that, in the context of suchalternative applications, any use of the terms “wafer” or “die” hereinmay be considered as synonymous with the more general terms “substrate”or “target portion”, respectively. The substrate referred to herein maybe processed, before or after exposure, in for example a track (a toolthat typically applies a layer of resist to a substrate and develops theexposed resist), a metrology tool and/or an inspection tool. Whereapplicable, the disclosure herein may be applied to such and othersubstrate processing tools. Further, the substrate may be processed morethan once, for example in order to create a multi-layer IC, so that theterm substrate used herein may also refer to a substrate that alreadycontains multiple processed layers.

Although specific reference may have been made above to the use ofembodiments of the present invention in the context of opticallithography, it will be appreciated that the present invention may beused in other applications, for example imprint lithography, and wherethe context allows, is not limited to optical lithography. In imprintlithography a topography in a patterning device defines the patterncreated on a substrate. The topography of the patterning device may bepressed into a layer of resist supplied to the substrate whereupon theresist is cured by applying electromagnetic radiation, heat, pressure ora combination thereof. The patterning device is moved out of the resistleaving a pattern in it after the resist is cured.

The terms “radiation” and “beam” used herein encompass all types ofelectromagnetic radiation, including ultraviolet (UV) radiation (e.g.having a wavelength of or about 365, 248, 193, 157 or 126 nm) andextreme ultra-violet (EUV) radiation (e.g. having a wavelength in therange of 5-20 nm), as well as particle beams, such as ion beams orelectron beams.

The term “lens”, where the context allows, may refer to any one orcombination of various types of optical components, includingrefractive, reflective, magnetic, electromagnetic and electrostaticoptical components.

While specific embodiments of the present invention have been describedabove, it will be appreciated that the invention may be practicedotherwise than as described. For example, the present invention may takethe form of a computer program containing one or more sequences ofmachine-readable instructions describing a method as disclosed above, ora data storage medium (e.g. semiconductor memory, magnetic or opticaldisk) having such a computer program stored therein.

The descriptions above are intended to be illustrative, not limiting.Thus, it will be appreciated that modifications may be made to theinvention as described without departing from the scope of the claimsset out below.

1. A lithographic apparatus, comprising: a grazing incidence mirror forreflecting a radiation beam to enhance a spectral purity of theradiation beam; an illumination system configured to condition theradiation beam; a support configured to support a patterning device, thepatterning device being configured to impart the conditioned radiationbeam with a pattern in its cross-section to form a patterned radiationbeam; a substrate table configured to hold a substrate; and a projectionsystem configured to project the patterned radiation beam onto a targetportion of the substrate.
 2. A lithographic apparatus according to claim1, wherein enhancing the spectral purity increases the proportion of EUVradiation in the radiation beam.
 3. A lithographic apparatus accordingto claim 1, wherein the lithographic apparatus has an optical train andthe spectral purity of the radiation beam is enhanced by configuring theoptical train to be three-dimensional.
 4. A lithographic apparatusaccording to claim 3, wherein the optical train is configured to bethree-dimensional by rotating a source-collector-module in thelithographic apparatus.
 5. A lithographic apparatus according to claim1, wherein a first grazing incidence mirror is situated in asource-collector-module of the lithographic apparatus and a secondgrazing incidence mirror is situated in the illumination system of thelithographic apparatus.
 6. A lithographic apparatus according to claim5, wherein the source-collector-module is rotated so that the first andsecond grazing incidence mirrors are in a three-dimensional arrangement.7. A lithographic apparatus according to claim 1, wherein the spectralpurity is enhanced by a grazing incidence mirror in an intermediatefocus of the lithographic apparatus.
 8. A lithographic apparatusaccording to claim 7, wherein the grazing incidence mirror in theintermediate focus has an optical axis and a reflecting surface, and theoptical axis is substantially in the reflecting surface.
 9. Alithographic apparatus according to claim 7, wherein the grazingincidence mirror in the intermediate focus forms part of athree-dimensional optical train with a grazing incidence mirror in theillumination system.
 10. A lithographic apparatus according to claim 1,wherein a further grazing incidence mirror is added in asource-collector-module and enhances spectral purity.
 11. A lithographicapparatus according to claim 1, wherein the radiation has a wavelengthof between about 5 nm and about 20 nm.
 12. A lithographic apparatusaccording to claim 1, wherein the radiation has a wavelength of about13.5 nm.
 13. A device manufacturing method, comprising: conditioningradiation beam using an illumination system; imparting a pattern to theradiation beam; projecting the patterned beam or radiation onto a targetportion of a substrate, and reflecting the radiation beam from at leastgrazing incidence mirror that enhances the spectral purity of theradiation beam.
 14. A device manufacturing method according to claim 13,wherein the spectral purity is enhanced by configuring an optical trainof the lithographic apparatus to be three-dimensional.
 15. A devicemanufacturing method according to claim 13, wherein an optical train isconfigured to be three-dimensional by rotating asource-collector-module.
 16. A device manufacturing method according toclaim 13, wherein a first grazing incidence mirror is situated in asource-collector-module and a second grazing incidence mirror issituated in the illumination system.
 17. A device manufacturing methodaccording to claim 16, wherein the source-collector-module is rotated sothat the first and second grazing incidence mirrors are in athree-dimensional arrangement.
 18. A device manufacturing methodaccording to claim 13, wherein the spectral purity is enhanced by agrazing incidence mirror in an intermediate focus.
 19. A devicemanufacturing method according to claim 18, wherein the grazingincidence mirror in the intermediate focus has an optical axis and areflecting surface, and the optical axis is substantially in thereflecting surface.
 20. A device manufacturing method according to claim13, wherein the spectral purity is enhanced by having a grazingincidence mirror in an intermediate focus being part of athree-dimensional optical train.
 21. A device manufacturing methodaccording to claim 20, wherein the grazing incidence mirror in theintermediate focus forms part of a three-dimensional optical train witha grazing incidence mirror in the illumination system.
 22. A devicemanufacturing method according to claim 13, wherein a further grazingincidence mirror is added in a source-collector-module and enhancesspectral purity.
 23. A device manufactured according to the method ofclaim
 13. 24. A device manufacturing method, comprising: projecting apatterned beam of radiation onto a substrate, wherein the radiation beamis reflected from at least one grazing incidence mirror that enhancesthe spectral purity of the radiation beam.
 25. A device manufacturingmethod according to claim 24, wherein the spectral purity is enhanced byconfiguring an optical train of the lithographic apparatus to bethree-dimensional.
 26. A device manufacturing method according to claim24, wherein an optical train is configured to be three-dimensional byrotating a source-collector-module.
 27. A device manufacturing methodaccording to claim 24, wherein a first grazing incidence mirror issituated in a source-collector-module and a second grazing incidencemirror is situated in the illumination system.
 28. A devicemanufacturing method according to claim 27, wherein thesource-collector-module is rotated so that the first and second grazingincidence mirrors are in a three-dimensional arrangement.
 29. A devicemanufacturing method according to claim 24, wherein the spectral purityis enhanced by a grazing incidence mirror in an intermediate focus. 30.A device manufacturing method according to claim 29, wherein the grazingincidence mirror in the intermediate focus has an optical axis and areflecting surface, and the optical axis is substantially in thereflecting surface.
 31. A device manufacturing method according to claim24, wherein the spectral purity is enhanced by having a grazingincidence mirror in an intermediate focus being part of athree-dimensional optical train.
 32. A device manufacturing methodaccording to claim 31, wherein the grazing incidence mirror in theintermediate focus forms part of a three-dimensional optical train witha grazing incidence mirror in the illumination system.
 33. A devicemanufacturing method according to claim 24, wherein a further grazingincidence mirror is added in a source-collector-module and enhancesspectral purity.
 34. A device manufactured according to the method ofclaim
 24. 35. A device manufacturing method, comprising: providing aradiation beam using an illumination system; imparting a pattern to theradiation beam; projecting the pattern radiation beam onto a substrate;and reflecting the radiation beam from at least one grazing incidencemirror that enhances the spectral purity of the radiation beam.
 36. Adevice manufacturing method according to claim 35, wherein the spectralpurity is enhanced by configuring an optical train of the lithographicapparatus to be three-dimensional.
 37. A device manufacturing methodaccording to claim 35, wherein an optical train is configured to bethree-dimensional by rotating a source-collector-module.
 38. A devicemanufacturing method according to claim 35, wherein a first grazingincidence mirror is situated in a source-collector-module and a secondgrazing incidence mirror is situated in the illumination system.
 39. Adevice manufacturing method according to claim 38, wherein thesource-collector-module is rotated so that the first and second grazingincidence mirrors are in a three-dimensional arrangement.
 40. A devicemanufacturing method according to claim 35, wherein the spectral purityis enhanced by a grazing incidence mirror in an intermediate focus. 41.A device manufacturing method according to claim 40, wherein the grazingincidence mirror in the intermediate focus has an optical axis and areflecting surface, and the optical axis is substantially in thereflecting surface.
 42. A device manufacturing method according to claim35, wherein the spectral purity is enhanced by having a grazingincidence mirror in an intermediate focus being part of athree-dimensional optical train.
 43. A device manufacturing methodaccording to claim 42, wherein the grazing incidence mirror in theintermediate focus forms part of a three-dimensional optical train witha grazing incidence mirror in the illumination system.
 44. A devicemanufacturing method according to claim 35, wherein a further grazingincidence mirror is added in a source-collector-module and enhancesspectral purity.
 45. A device manufactured according to the method ofclaim 35.